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Characterization of Ultra Low-K Dielectric Materials by STEM EELS Elemental Mapping

Published online by Cambridge University Press:  23 September 2015

Wayne W. Zhao ,
Michael Gribelyuk  and
Jeremy D. Russell

Abstract

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Microscopy and Microanalysis , Volume 21 , Supplement S3: Proceedings of Microscopy & Microanalysis 2015 , August 2015 , pp. 2075 - 2076
Copyright
Copyright © Microscopy Society of America 2015 

References

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