Hostname: page-component-586b7cd67f-dlnhk Total loading time: 0 Render date: 2024-11-26T15:51:07.080Z Has data issue: false hasContentIssue false
  • English
  • Français

Characterization of Nanoindentations in Silicon by Cross-sectional TEM

Published online by Cambridge University Press:  01 August 2004

Songqing Wen ,
James Bentley ,
Jae-il Jang ,
Ian M. Anderson  and
George M. Pharr
Songqing Wen
Affiliation:
University of Tennessee
James Bentley
Affiliation:
Oak Ridge National Laboratory, Tennessee
Jae-il Jang
Affiliation:
University of Tennessee
Ian M. Anderson
Affiliation:
Oak Ridge National Laboratory, Tennessee
George M. Pharr
Affiliation:
University of Tennessee Oak Ridge National Laboratory, Tennessee
Get access

Extract

Extended abstract of a paper presented at Microscopy and Microanalysis 2004 in Savannah, Georgia, USA, August 1–5, 2004.

Type
Research Article
Information
Microscopy and Microanalysis , Volume 10 , Issue S02 , August 2004 , pp. 56 - 57
Copyright
© 2004 Microscopy Society of America

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)