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Characterization of a 4-Quadrant-Large-Angles BSE-Detector for in-situ 3D Quantitative Analysis of the Sample Morphology in SEM

Published online by Cambridge University Press:  07 September 2007

D Berger
D Berger*
Affiliation:
Technische Universität Berlin, Germany
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Extract

Extended abstract of a paper presented at MC 2007, 33rd DGE Conference in Saarbrücken, Germany, September 2 – September 7, 2007

Type
Research Article
Information
Microscopy and Microanalysis , Volume 13 , Issue S03 , September 2007 , pp. 74 - 75
Copyright
Copyright © Microscopy Society of America 2007

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