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Characterization of 6H-SiC/SiO2 Interfaces by EFTEM Elemental Mapping

Published online by Cambridge University Press:  01 August 2005

J Bentley ,
K-C Chang  and
L M Porter
J Bentley
Affiliation:
Oak Ridge National Laboratory, Oak Ridge, Tennessee
K-C Chang
Affiliation:
Seagate Technology, Pittsburgh, Pennsylvania
L M Porter
Affiliation:
Carnegie Mellon University, Pittsburgh, Pennsylvania

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2005 in Honolulu, Hawaii, USA, July 31--August 4, 2005

Type
Research Article
Information
Microscopy and Microanalysis , Volume 11 , Issue S02 , August 2005 , pp. 494 - 495
Copyright
© 2005 Microscopy Society of America