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Channeling Contrast in Helium Ion Microscopy

Published online by Cambridge University Press:  23 November 2012

D.C. Bell*
Affiliation:
School of Engineering, Harvard University, Cambridge, MA
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Abstract

Extended abstract of a paper presented at Microscopy and Microanalysis 2012 in Phoenix, Arizona, USA, July 29 – August 2, 2012.

Type
Research Article
Copyright
Copyright © Microscopy Society of America 2012

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