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Challenges for Electron Tomography of Nanoscale Electrical Devices: Geometry and Beam Damage

Published online by Cambridge University Press:  08 April 2017

M Mecklenburg ,
B Shevitski ,
S Singer  and
B Regan
M Mecklenburg
Affiliation:
University of California, Los Angeles
B Shevitski
Affiliation:
University of California, Los Angeles
S Singer
Affiliation:
University of California, Los Angeles
B Regan
Affiliation:
University of California, Los Angeles

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2011 in Nashville, Tennessee, USA, August 7–August 11, 2011.

Type
Abstract
Information
Microscopy and Microanalysis , Volume 17 , Supplement S2 , July 2011 , pp. 1548 - 1549
Copyright
Copyright © Microscopy Society of America 2011