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A Case-Study of Bubble Formation Mechanism by Analytical TEM during Evaluation of an Incoming Spin-On-Hardmask at Wafer-Foundries

Published online by Cambridge University Press:  05 August 2019

Wayne W. Zhao  and
Frieder Baumann
Wayne W. Zhao*
Affiliation:
Physical Failure Analysis, Center for Complex Analysis, Characterization Group, Fab8, GLOBALFOUNDRIES, Malta, New York, USA.
Frieder Baumann
Affiliation:
Physical Failure Analysis, Center for Complex Analysis, Characterization Group, Fab8, GLOBALFOUNDRIES, Malta, New York, USA.
*
*Corresponding author: [email protected]

Abstract

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Type
Spectroscopy and Imaging of Nanostructured Low-Z Materials in the Electron Microscope
Information
Microscopy and Microanalysis , Volume 25 , Supplement S2 , August 2019 , pp. 1784 - 1785
Copyright
Copyright © Microscopy Society of America 2019 

References

References and Acknowledgments:

[1]Zhao, W and Gribelyuk, M, Microscopy & Microanalysis 24 (Supplement 1) (2018), p. 1998.Google Scholar
[1]Zhao, W et al. , Microscopy & Microanalysis 23 (Supplement 1) (2017), p. 336.Google Scholar
[2]Zhao, W and Wang, Y, Microscopy & Microanalysis 23 (Supplement 1) (2017), p. 1490.Google Scholar
[3]Fu, B et al. , Microscopy & Microanalysis 23 (Supplement 1) (2017), p. 1456.Google Scholar
[4]Zhao, W and Gribelyuk, M, Microscopy & Microanalysis 22 (Supplement 3) (2016), p. 1532.Google Scholar
[5]Zhao, W et al. , Microscopy & Microanalysis 20 (Supplement 3) (2014), p. 362.Google Scholar
[6]Wu, W-H et al. , Proc. of SPIE, Vol. 7140 (2008), p. 71402Q-1.Google Scholar
[7]Dar, R et al. , Proc. of 44th ISTFA (2018), p. 153.Google Scholar
[8]Thanks go to Jason Behnke, Rebecca Dar, Laurent Dumas, and Corbin Bennett of GLOBALFOUNDRIES Fab8 for inspiring discussions and technical supports, and Fab8 Management and Legal teams for supporting the publication clearance.Google Scholar