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Carbon Capping for Specimen Preparation of Atom Probe Samples with Features of Interest Near the Surface

Published online by Cambridge University Press:  22 July 2022

Edwin Supple ,
Chomani Gaspe ,
Kevin J. Dwyer ,
Robert Butera ,
Christopher J. K. Richardson  and
Brian Gorman
Edwin Supple*
Affiliation:
Colorado School of Mines, Golden, CO, United States of America
Chomani Gaspe
Affiliation:
Laboratory for Physical Sciences, College Park, MD, United States
Kevin J. Dwyer
Affiliation:
Laboratory for Physical Sciences, College Park, MD, United States
Robert Butera
Affiliation:
Laboratory for Physical Sciences, College Park, MD, United States
Christopher J. K. Richardson
Affiliation:
Laboratory for Physical Sciences, College Park, MD, United States
Brian Gorman
Affiliation:
Colorado School of Mines, Golden, CO, United States of America
*
*Corresponding author: [email protected]

Abstract

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Type
Expanding the Limits of Atom Probe Tomography
Information
Microscopy and Microanalysis , Volume 28 , Supplement S1 , August 2022 , pp. 744 - 746
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Copyright
Copyright © Microscopy Society of America 2022

References

Diercks, D. R., Gorman, B. P., and Mulders, J. J. L., “Electron Beam-Induced Deposition for Atom Probe Tomography Specimen Capping Layers,” Microsc. Microanal., vol. 23, no. 2, pp. 321–328, Apr. 2017, doi: 10.1017/S1431927616011740.CrossRefGoogle Scholar
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Thompson, K., Lawrence, D., Larson, D. J., Olson, J. D., Kelly, T. F., and Gorman, B., “In situ site-specific specimen preparation for atom probe tomography,” Ultramicroscopy, vol. 107, no. 2, pp. 131–139, Feb. 2007, doi: 10.1016/j.ultramic.2006.06.008.CrossRefGoogle ScholarPubMed