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Buried Oxide Formation in Low-Dose Low-Energy SIMOX

Published online by Cambridge University Press:  22 July 2003

Tula Jutarosaga ,
Jun Sik Jeoung  and
Supapan Seraphin
Tula Jutarosaga
Affiliation:
Department of Materials Science and Engineering, The University of Arizona, Tucson, AZ 8572
Jun Sik Jeoung
Affiliation:
Department of Materials Science and Engineering, The University of Arizona, Tucson, AZ 8572
Supapan Seraphin
Affiliation:
Department of Materials Science and Engineering, The University of Arizona, Tucson, AZ 8572

Abstract

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Abstract
Information
Microscopy and Microanalysis , Volume 9 , Issue S02 , August 2003 , pp. 504 - 505
Copyright
Copyright © Microscopy Society of America 2003