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The Benefits Associated With a 1 mm Beam Gas Path Length on the Accuracy of X-ray Analysis in the Variable Pressure SEM

Published online by Cambridge University Press:  26 July 2009

SJ Bean
Affiliation:
Carl Zeiss SMT Ltd,United Kingdom
VM Kugler
Affiliation:
Carl Zeiss SMT Ltd,United Kingdom
D Connor
Affiliation:
Carl Zeiss SMT Ltd,United Kingdom

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2009 in Richmond, Virginia, USA, July 26 – July 30, 2009

Type
Abstract
Copyright
Copyright © Microscopy Society of America 2009