The Benefits Associated With a 1 mm Beam Gas Path Length on the Accuracy of X-ray Analysis in the Variable Pressure SEM

SJ Bean; VM Kugler; D Connor

doi:10.1017/S1431927609094094

The Benefits Associated With a 1 mm Beam Gas Path Length on the Accuracy of X-ray Analysis in the Variable Pressure SEM

Published online by Cambridge University Press: 26 July 2009

SJ Bean ,

VM Kugler and

D Connor

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SJ Bean: Affiliation:
Carl Zeiss SMT Ltd,United Kingdom
VM Kugler: Affiliation:
Carl Zeiss SMT Ltd,United Kingdom
D Connor: Affiliation:
Carl Zeiss SMT Ltd,United Kingdom

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Extended abstract of a paper presented at Microscopy and Microanalysis 2009 in Richmond, Virginia, USA, July 26 – July 30, 2009

Type: Abstract
Information: Microscopy and Microanalysis , Volume 15 , Supplement S2 , July 2009 , pp. 1112 - 1113

DOI: https://doi.org/10.1017/S1431927609094094 [Opens in a new window]

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The Benefits Associated With a 1 mm Beam Gas Path Length on the Accuracy of X-ray Analysis in the Variable Pressure SEM

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