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Beam skirting effects on energy deposition profile in VP-SEM

Published online by Cambridge University Press:  03 August 2008

BD Myers ,
Z Pan  and
VP Dravid
BD Myers
Affiliation:
Northwestern University
Z Pan
Affiliation:
Northwestern University
VP Dravid
Affiliation:
Northwestern University
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Extract

Extended abstract of a paper presented at Microscopy and Microanalysis 2008 in Albuquerque, New Mexico, USA, August 3 – August 7, 2008

Type
Research Article
Information
Microscopy and Microanalysis , Volume 14 , Supplement S2 , August 2008 , pp. 1208 - 1209
Copyright
© 2008 Microscopy Society of America

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