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Beam Size in the Environmental SEM: a Comparison of Model and Experimental Data

Published online by Cambridge University Press:  02 July 2020

S. A. Wight
S. A. Wight*
Affiliation:
Surface and Microanalysis Science Division, National Institute of Standards and Technology, Gaithersburg, MD, 20899
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Extract

Knowledge of the magnitude of the scattered electron skirt in the environmental scanning electron microscope (ESEM) or low vacuum scanning electron microscope (LVSEM) is important to the understanding of the analytical spatial resolution of energy dispersive spectrometry (EDS). The extent of beam scattering is a function of the distance from the final aperture to the specimen, composition of the gas present, chamber pressure, accelerating voltage, and beam current. This work compares model predictions of electron scattering to experimental measurements of electron scattering. Several of the popular Monte Carlo programs written for electron-solid interactions were not designed for low vacuum conditions. Joy has developed a model that takes into account the electron scattering which takes place in the chamber before interacting with the specimen; thus it is useful for LVSEM conditions. That model is incorporated in Electron Flight Simulator - E (Small World, Vienna VA)1 and is used in this work.

Type
New Trends in Scanning Electron Microscopy and Microanalysis
Information
Microscopy and Microanalysis , Volume 4 , Issue S2: Proceedings: Microscopy & Microanalysis '98, Microscopy Society of America 56th Annual Meeting, Microbeam Analysis Society 32nd Annual Meeting, Atlanta, Georgia July 12-16, 1998 , July 1998 , pp. 298 - 299
Copyright
Copyright © Microscopy Society of America

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References

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