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Beam Characterization for Scanning Electron Microscopes by the RPS and IPC Methods

Published online by Cambridge University Press:  28 September 2015

Tomoyo Sasaki
Affiliation:
Hitachi High-Technologies Corporation, 882, Ichige, Hitachinaka-shi, Ibaraki-ken, 312-8504, Japan Graduate School of Science and Engineering, Ibaraki University, 4-12-1, Nakanarusawa-cho, Hitachi-shi, Ibaraki-ken, 316-8511, Japan
Mitsugu Sato
Affiliation:
Hitachi High-Technologies Corporation, 882, Ichige, Hitachinaka-shi, Ibaraki-ken, 312-8504, Japan
Kishio Hidaka
Affiliation:
Department of Education, Art and Science, Yamagata University, 1-4-12, Kojirakawamachi, Yamagata-shi, Yamagata-ken, 990-8560, Japan
Jin Onuki
Affiliation:
Graduate School of Science and Engineering, Ibaraki University, 4-12-1, Nakanarusawa-cho, Hitachi-shi, Ibaraki-ken, 316-8511, Japan

Abstract

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Type
Electron Optics
Copyright
Copyright © Microscopy Society of America 2015 

References

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[10] The authors are grateful to Dr. A. M. Blackburn for his valuable comments to this work.Google Scholar