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Beam broadening of keV electrons in matter calculated by numerical solution of the electron transport equation

Published online by Cambridge University Press:  30 July 2021

Erich Müller ,
Milena Hugenschmidt  and
Dagmar Gerthsen
Erich Müller
Affiliation:
Karlsruhe Institute of Technology (KIT), Laboratory for Electron Microscopy (LEM), Engesserstraße 7, 76131 Karlsruhe, Germany, United States
Milena Hugenschmidt
Affiliation:
Karlsruhe Institute of Technology, Laboratory for Electron Microscopy, Karlsruhe, Germany
Dagmar Gerthsen
Affiliation:
Laboratorium für Elektronenmikroskopie, Karlsruher Institut für Technologie (KIT), Engesserstr. 7, 76131Karlsruhe, Germany, United States

Abstract

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Type
Advances in Analytical STEM-in-SEM
Information
Microscopy and Microanalysis , Volume 27 , Supplement S1 , August 2021 , pp. 1586 - 1589
Copyright
Copyright © The Author(s), 2021. Published by Cambridge University Press on behalf of the Microscopy Society of America

References

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Negreanu, C, Radiation Physics and Chemistry 74 (2005), p. 264.Google Scholar
Müller, E et al. , Phys. Rev. Research 2 (2020), p. 043313CrossRefGoogle Scholar
We acknowledge funding by the Deutsche Forschungsgemeinschaft (DFG, German Research Foundation) under Germany's Excellence Strategy – 2082/1–390761711.Google Scholar