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Backscattered Electron Imaging in the Scanning Electron Microscope: the Use of Either: (a) High Incident Energy or (b) an Array Detector

Published online by Cambridge University Press:  03 August 2008

LM Gignac ,
OC Wells ,
C-K Hu ,
J Bruley ,
CE Murray  and
A Frye
LM Gignac
Affiliation:
IBM T J Watson Research Center
OC Wells
Affiliation:
IBM T J Watson Research Center
C-K Hu
Affiliation:
IBM T J Watson Research Center
J Bruley
Affiliation:
IBM T J Watson Research Center
CE Murray
Affiliation:
IBM T J Watson Research Center
A Frye
Affiliation:
IBM Systems & Technology Group
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Extract

Extended abstract of a paper presented at Microscopy and Microanalysis 2008 in Albuquerque, New Mexico, USA, August 3 – August 7, 2008

Type
Research Article
Information
Microscopy and Microanalysis , Volume 14 , Supplement S2 , August 2008 , pp. 120 - 121
Copyright
© 2008 Microscopy Society of America

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