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Avoiding Bias of Focused Ion Beam Edge Resolution Measurements at High Doses

Published online by Cambridge University Press:  28 September 2015

Zinovi Malamud ,
Yuval Greenzweig  and
Amir Raveh

Abstract

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Type
Ion Optics
Information
Microscopy and Microanalysis , Volume 21 , Supplement S4: Proceedings Ninth International Conference on Charged Particle Optics , June 2015 , pp. 90 - 93
Copyright
Copyright © Microscopy Society of America 2015 

References

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