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Automated TEM Sample Preparation from Smaller Device Structure Regions of Semiconductor ICs using Inline Dual-Beam CLM+ and TEMLink 150

Published online by Cambridge University Press:  09 October 2013

R.S. Rai ,
E. Chen ,
Y. Zhang ,
D. Nedeau ,
Y. Chen ,
W. Zhao ,
S.K. Lim ,
Z.-H. Mai  and
J. Lam
R.S. Rai
Affiliation:
E. Chen
Affiliation:
Y. Zhang
Affiliation:
D. Nedeau
Affiliation:
Y. Chen
Affiliation:
W. Zhao
Affiliation:
S.K. Lim
Affiliation:
Z.-H. Mai
Affiliation:
J. Lam
Affiliation:

Abstract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2013 in Indianapolis, Indiana, USA, August 4 – August 8, 2013.

Type
Abstract
Information
Microscopy and Microanalysis , Volume 19 , Issue S2: Proceedings of Microscopy & Microanalysis 2013 , August 2013 , pp. 900 - 901
Copyright
Copyright © Microscopy Society of America 2013