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Automated SEM Analysis in Industrial Process Control and Scientific Research

Published online by Cambridge University Press:  27 August 2014

C. Lang ,
A. Hyde ,
Matthew Hiscock ,
S. Burgess ,
J. Holland  and
P. Statham
C. Lang
Affiliation:
Oxford Instruments NanoAnalysis, Halifax Road, High Wycombe, HP12 3SE, UK
A. Hyde
Affiliation:
Oxford Instruments NanoAnalysis, Halifax Road, High Wycombe, HP12 3SE, UK
Matthew Hiscock
Affiliation:
Oxford Instruments NanoAnalysis, Halifax Road, High Wycombe, HP12 3SE, UK
S. Burgess
Affiliation:
Oxford Instruments NanoAnalysis, Halifax Road, High Wycombe, HP12 3SE, UK
J. Holland
Affiliation:
Oxford Instruments NanoAnalysis, Halifax Road, High Wycombe, HP12 3SE, UK
P. Statham
Affiliation:
Oxford Instruments NanoAnalysis, Halifax Road, High Wycombe, HP12 3SE, UK

Abstract

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Information
Microscopy and Microanalysis , Volume 20 , Supplement S3: Proceedings of Microscopy & Microanalysis 2014 , August 2014 , pp. 1106 - 1107
Copyright
Copyright © Microscopy Society of America 2014