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Auger To The Max: Can We Color The Atoms In Our Stem Images?

Published online by Cambridge University Press:  02 July 2020

Gary G. Hembree*
Affiliation:
Department of Physics and Astronomy, Arizona State University, Tempe, AZ85287-1504
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Extract

A probable future development in materials science is the selective manipulation of structure on an atom by atom basis. Along with the ability to manipulate atoms we will need to be able to tell if the correct ordering has been achieved. Thus the ultimate goal of spectroscopic imaging will be to create a species-labeled two or three dimensional map of the atom positions in the sample. In this paper we will show how far we have progressed towards this goal with Auger electron spectroscopy (AES), how much further we have to go and what the prospects are for overcoming the known obstacles.

AES is inherently surface-sensitive because low energy electrons have very small inelastic mean free paths. This scattering mechanism insures that only those electrons created within a few atomic diameters of the sample surface facing the detector will contribute significantly to the measured signal.

Type
Microscopy and Microanalysis: “Showstoppers” in Critical Applications Areas
Copyright
Copyright © Microscopy Society of America 1997

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References

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Figure 1 data files provided by J. Liu. This work was partially supported by the Office of Naval Research under grant number N00014-93-1-0099 and made use of the facilities at the ASU Center for High Resolution Electron MicroscopyGoogle Scholar