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Auger Analysis Of Focused Ion Beam Prepared Lift -Out Specimens

Published online by Cambridge University Press:  01 August 2002

B.B. Rossie ,
R. M. Mills ,
S.D. Anderson ,
M. Antonell  and
F.A. Stevie
B.B. Rossie
Affiliation:
Agere Systems, 9333 South John Young Parkway, Orlando, FL 32819
R. M. Mills
Affiliation:
Agere Systems, 9333 South John Young Parkway, Orlando, FL 32819
S.D. Anderson
Affiliation:
Agere Systems, 9333 South John Young Parkway, Orlando, FL 32819
M. Antonell
Affiliation:
RF Micro Devices, 7625 Thorndike Rd., Greensboro, NC 27409
F.A. Stevie
Affiliation:
North Carolina State University, Box 7531, Raleigh, NC 27695

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 8 , Issue S02 , August 2002 , pp. 556 - 557
Copyright
Copyright © Microscopy Society of America 2002