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Atomic-scale Fabrication of 1D-2D Nano Hetero-structures within 2D Materials through Automated Tracking and Electron Beam Control

Published online by Cambridge University Press:  22 July 2022

Matthew G. Boebinger ,
Ayana Ghosh ,
Sudhajit Misra ,
Kevin Roccapriore ,
Kai Xiao ,
Andrew R. Lupini ,
Panchapakesan Ganesh ,
Maxim Ziatdinov ,
Sergei V. Kalinin  and
Stephen Jesse
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Matthew G. Boebinger
Affiliation:
Center for Nanophase Materials Sciences, Oak Ridge National Laboratory, Oak Ridge, TN, USA
Ayana Ghosh
Affiliation:
Center for Nanophase Materials Sciences, Oak Ridge National Laboratory, Oak Ridge, TN, USA
Sudhajit Misra
Affiliation:
Center for Nanophase Materials Sciences, Oak Ridge National Laboratory, Oak Ridge, TN, USA
Kevin Roccapriore
Affiliation:
Center for Nanophase Materials Sciences, Oak Ridge National Laboratory, Oak Ridge, TN, USA
Kai Xiao
Affiliation:
Center for Nanophase Materials Sciences, Oak Ridge National Laboratory, Oak Ridge, TN, USA
Andrew R. Lupini
Affiliation:
Center for Nanophase Materials Sciences, Oak Ridge National Laboratory, Oak Ridge, TN, USA
Panchapakesan Ganesh
Affiliation:
Center for Nanophase Materials Sciences, Oak Ridge National Laboratory, Oak Ridge, TN, USA
Maxim Ziatdinov
Affiliation:
Center for Nanophase Materials Sciences, Oak Ridge National Laboratory, Oak Ridge, TN, USA
Sergei V. Kalinin
Affiliation:
Department of Materials Science and Engineering, University of Tennessee, Knoxville TN, USA
Stephen Jesse
Affiliation:
Center for Nanophase Materials Sciences, Oak Ridge National Laboratory, Oak Ridge, TN, USA
Raymond R. Unocic
Affiliation:
Center for Nanophase Materials Sciences, Oak Ridge National Laboratory, Oak Ridge, TN, USA

Abstract

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Type
Electron Microscopy of Beam Sensitive Samples: The Trials and Tribulations of Electron-beam Sample Interactions
Information
Microscopy and Microanalysis , Volume 28 , Supplement S1 , August 2022 , pp. 2178 - 2180
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Copyright
Copyright © Microscopy Society of America 2022

References

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Microscopy research was performed at the Center for Nanophase Materials Sciences at Oak Ridge National Laboratory, which is a US Department of Energy (DOE), Office of Science User Facility. This manuscript has been authored by UT-Battelle, LLC, under contract DE-AC05-00OR22725 with the US Department of Energy (DOE). The US government retains and the publisher, by accepting the article for publication, acknowledges that the US government retains a nonexclusive, paid-up, irrevocable, worldwide license to publish or reproduce the published form of this manuscript, or allow others to do so, for US government purposes. DOE will provide public access to these results of federally sponsored research in accordance with the DOE Public Access Plan (http://energy.gov/downloads/doe-public-access-plan).Google Scholar