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Atom Probe Tomography Productivity Enhancements

Published online by Cambridge University Press:  05 August 2019

D.A. Reinhard ,
T.R. Payne ,
E.M. Strennen ,
E. Oltman ,
B.P. Geiser ,
G.S. Sobering ,
D.R. Lenz ,
J. Mandt ,
G.A. Groth  and
D.J. Larson
...Show all authors
D.A. Reinhard*
Affiliation:
CAMECA Instruments Inc., 5470 Nobel Drive, Madison, WI 53711USA.
T.R. Payne
Affiliation:
CAMECA Instruments Inc., 5470 Nobel Drive, Madison, WI 53711USA.
E.M. Strennen
Affiliation:
CAMECA Instruments Inc., 5470 Nobel Drive, Madison, WI 53711USA.
E. Oltman
Affiliation:
CAMECA Instruments Inc., 5470 Nobel Drive, Madison, WI 53711USA.
B.P. Geiser
Affiliation:
CAMECA Instruments Inc., 5470 Nobel Drive, Madison, WI 53711USA.
G.S. Sobering
Affiliation:
CAMECA Instruments Inc., 5470 Nobel Drive, Madison, WI 53711USA.
D.R. Lenz
Affiliation:
CAMECA Instruments Inc., 5470 Nobel Drive, Madison, WI 53711USA.
J. Mandt
Affiliation:
CAMECA Instruments Inc., 5470 Nobel Drive, Madison, WI 53711USA.
G.A. Groth
Affiliation:
CAMECA Instruments Inc., 5470 Nobel Drive, Madison, WI 53711USA.
D.J. Larson
Affiliation:
CAMECA Instruments Inc., 5470 Nobel Drive, Madison, WI 53711USA.
R.M. Ulfig
Affiliation:
CAMECA Instruments Inc., 5470 Nobel Drive, Madison, WI 53711USA.
T.J. Prosa
Affiliation:
CAMECA Instruments Inc., 5470 Nobel Drive, Madison, WI 53711USA.
*
*Corresponding author: [email protected]

Abstract

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Type
Vendor Symposium
Information
Microscopy and Microanalysis , Volume 25 , Supplement S2 , August 2019 , pp. 522 - 523
Copyright
Copyright © Microscopy Society of America 2019 

References

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[7]Prosa, T.J. et al. , Frontiers of Characterization and Metrology for Nanoelectronics (NIST, Gaithersburg, Md, 2013), pp. 269–272.Google Scholar