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Atom Probe Tomography of III-Nitrides Based Semiconducting Devices

Published online by Cambridge University Press:  09 October 2013

R. Shivaraman ,
Y.-R. Wu ,
S. Choi ,
R. Chung  and
J. Speck
R. Shivaraman
Affiliation:
Y.-R. Wu
Affiliation:
S. Choi
Affiliation:
R. Chung
Affiliation:
J. Speck
Affiliation:

Abstract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2013 in Indianapolis, Indiana, USA, August 4 – August 8, 2013.

Type
Abstract
Information
Microscopy and Microanalysis , Volume 19 , Issue S2: Proceedings of Microscopy & Microanalysis 2013 , August 2013 , pp. 956 - 957
Copyright
Copyright © Microscopy Society of America 2013