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Assessment of the TEM Information Limit by Means of Tilted Illumination

Published online by Cambridge University Press:  09 October 2013

H. Mueller ,
S. Uhlemann ,
J. Zach ,
P. Hartel  and
M. Haider
H. Mueller
Affiliation:
S. Uhlemann
Affiliation:
J. Zach
Affiliation:
P. Hartel
Affiliation:
M. Haider
Affiliation:

Abstract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2013 in Indianapolis, Indiana, USA, August 4 – August 8, 2013.

Type
Abstract
Information
Microscopy and Microanalysis , Volume 19 , Issue S2: Proceedings of Microscopy & Microanalysis 2013 , August 2013 , pp. 612 - 613
Copyright
Copyright © Microscopy Society of America 2013