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Assessment of SEM Image Quality using 1D Power Spectral Density Estimation

Published online by Cambridge University Press:  26 July 2009

SJ Moody ,
MR Phillips  and
M Toth
SJ Moody
Affiliation:
University of Technology,Sydney Australia
MR Phillips
Affiliation:
University of Technology,Sydney Australia
M Toth
Affiliation:
FEI Company

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2009 in Richmond, Virginia, USA, July 26 – July 30, 2009

Type
Abstract
Information
Microscopy and Microanalysis , Volume 15 , Supplement S2 , July 2009 , pp. 48 - 49
Copyright
Copyright © Microscopy Society of America 2009