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Assessing the Spatial Accuracy of the Reconstruction in Atom Probe Tomography and a New Calibratable Adaptive Reconstruction

Published online by Cambridge University Press:  25 April 2019

Anna V. Ceguerra Open the ORCID record for Anna V. Ceguerra [Opens in a new window] ,
Alec C. Day  and
Simon P. Ringer
Anna V. Ceguerra*
Affiliation:
Australian Centre for Microscopy & Microanalysis, and School of Aerospace, Mechanical and Mechatronic Engineering, The University of Sydney, Sydney, NSW 2006, Australia
Alec C. Day
Affiliation:
Australian Centre for Microscopy & Microanalysis, and School of Aerospace, Mechanical and Mechatronic Engineering, The University of Sydney, Sydney, NSW 2006, Australia
Simon P. Ringer
Affiliation:
Australian Centre for Microscopy & Microanalysis, and School of Aerospace, Mechanical and Mechatronic Engineering, The University of Sydney, Sydney, NSW 2006, Australia
*
*Author for correspondence: Anna V. Ceguerra, E-mail: [email protected]
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Abstract

We define a measure for the accuracy of tomographic reconstruction in atom probe tomography, named here the spatial error index. We demonstrate that this index can be used to compare rigorously the spatial accuracy of various different approaches to the calculation of tomographic reconstruction. This is useful, for example, to evaluate the performance of alternate tomographic reconstruction approaches, and ensures that the comparisons are independent of individual data quality or other instrumental parameters. We then introduce a new “adaptive reconstruction” formalism that uses a progression of reconstruction parameters based on a per-atom correction from the cube root of the inverse of the voltage, along with linear correction factors linked to the evaporation sequence. We apply the measure for spatial accuracy to this new reconstruction protocol.

Keywords

Atom probe microscopyatom probe tomographyspatial accuracytomographic reconstruction
Type
Reconstruction
Information
Microscopy and Microanalysis , Volume 25 , Special Issue 2: Atom Probe Tomography and Microscopy APT&M 2018 , April 2019 , pp. 309 - 319
Copyright
Copyright © Microscopy Society of America 2019 

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