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Applications of the Cesium Low Temperature Ion Source

Published online by Cambridge University Press:  30 July 2021

Adam Steele ,
Andrew Schwarzkopf  and
Brenton Knuffman
Adam Steele
Affiliation:
zeroK NanoTech Corporation, United States
Andrew Schwarzkopf
Affiliation:
zeroK NanoTech Corporation, United States
Brenton Knuffman
Affiliation:
zeroK NanoTech Coporation, United States

Abstract

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Type
Advances in Focused Ion Beam Instrumentation, Applications and Techniques in and Materials and Life Sciences
Information
Microscopy and Microanalysis , Volume 27 , Supplement S1 , August 2021 , pp. 24 - 25
Copyright
Copyright © The Author(s), 2021. Published by Cambridge University Press on behalf of the Microscopy Society of America

References

Steele, A. V., Schwarzkopf, A., McClelland, J. J., and Knuffman, B.. Nano Futures. 1, 015005 (2017).CrossRefGoogle Scholar
Knuffman, B, Steele, AV, and McClelland, JJ. J. Appl. Phys. 114, 4 (2013).CrossRefGoogle Scholar