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Applications for Argon in a Triple Beam

Published online by Cambridge University Press:  26 July 2009

T Fujii ,
H Suzuki ,
X Man ,
M Hassel Shearer  and
M Takahashi
T Fujii
Affiliation:
SII NanoTechnology Inc,Japan
H Suzuki
Affiliation:
SII NanoTechnology Inc,Japan
X Man
Affiliation:
SII NanoTechnology Inc,Japan
M Hassel Shearer
Affiliation:
SII NanoTechnology Inc,USA
M Takahashi
Affiliation:
SII NanoTechnology Inc,USA

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2009 in Richmond, Virginia, USA, July 26 – July 30, 2009

Type
Abstract
Information
Microscopy and Microanalysis , Volume 15 , Supplement S2 , July 2009 , pp. 322 - 323
Copyright
Copyright © Microscopy Society of America 2009