Hostname: page-component-586b7cd67f-l7hp2 Total loading time: 0 Render date: 2024-11-29T16:42:31.087Z Has data issue: false hasContentIssue false
  • English
  • Français

Application of Focused Helium Ion Beams for Direct-write Lithography of Superconducting Electronics

Published online by Cambridge University Press:  23 September 2015

Shane Cybart ,
E. Y. Cho ,
B. H. Wehlin ,
Meng Ma ,
T. J. Wong ,
R. C. Dynes  and
Chuong Huynh
Shane Cybart
Affiliation:
Oxide Nano Electronics Laboratory, Department of Physics, University of California San Diego, USA.
E. Y. Cho
Affiliation:
Oxide Nano Electronics Laboratory, Department of Physics, University of California San Diego, USA.
B. H. Wehlin
Affiliation:
Oxide Nano Electronics Laboratory, Department of Physics, University of California San Diego, USA.
Meng Ma
Affiliation:
Oxide Nano Electronics Laboratory, Department of Physics, University of California San Diego, USA.
T. J. Wong
Affiliation:
Oxide Nano Electronics Laboratory, Department of Physics, University of California San Diego, USA.
R. C. Dynes
Affiliation:
Oxide Nano Electronics Laboratory, Department of Physics, University of California San Diego, USA.
Chuong Huynh
Affiliation:
Carl Zeiss Microscopy, LLC., One Corporation Way, Peabody, MA, USA.

Abstract

An abstract is not available for this content so a preview has been provided. As you have access to this content, a full PDF is available via the ‘Save PDF’ action button.
Image of the first page of this content. For PDF version, please use the ‘Save PDF’ preceeding this image.'
Type
Abstract
Information
Microscopy and Microanalysis , Volume 21 , Supplement S3: Proceedings of Microscopy & Microanalysis 2015 , August 2015 , pp. 2321 - 2322
Copyright
Copyright © Microscopy Society of America 2015 

References

References:

[1] Ward, B. W., Notte, J. A. & Economou, N. P., J. Vac. Sci. Technol., B 24 (2006).Google Scholar
[2] Cybart, S. A., et al, arXiv: 1409.4876 http://arxiv.org/abs/1409.4876 (2014).Google Scholar
[3] Valles, J. M., et al, Phys. Rev. B. 39 (1989). p. 11599.Google Scholar
[4] The authors gratefully acknowledge Garrett Schlenvogt for help with ion implantation simulations. This work was funded by the Air Force Office of Scientific Research and the UC Scholars Program..Google Scholar