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Application of Epma Area Analysis To Thickness Measurement of Thin-Films

Published online by Cambridge University Press:  02 July 2020

M. Takakura ,
H.Takahashi ,
Y. Kondo ,
T. Okumura  and
C. Nielsen
M. Takakura
Affiliation:
JEOL Ltd., 1-2 Musashino 3-chome, Akishima, Tokyo, 196, Japan
H.Takahashi
Affiliation:
JEOL Ltd., 1-2 Musashino 3-chome, Akishima, Tokyo, 196, Japan
Y. Kondo
Affiliation:
JEOL Ltd., 1-2 Musashino 3-chome, Akishima, Tokyo, 196, Japan
T. Okumura
Affiliation:
JEOL Ltd., 1-2 Musashino 3-chome, Akishima, Tokyo, 196, Japan
C. Nielsen
Affiliation:
JEOL USA Inc., 11 Dearborn Road Peabody, , MA, 01960, USA
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Extract

Electron Probe Micro Analyzer (EPMA) uses the characteristic X-ray for analysis. Therefore the depth of analysis area is spread to a few micrometer. It is difficult to make the quantitative or state analysis of surface thin-film. However, it is possible to measure the thickness of thin-film by using the X-ray intensity ratio between the film and bulk standard specimen under an assumed X-ray depth distribution function. In this paper, a known composition thin-film was measured by EPMA and the result was applied to thin-film area analysis.

Film thickness was measured as mass thickness (ρz) by the intensity ratio of the characteristic X-ray intensities between the thin-film and bulk standard. As the X-ray distribution function ϕ(ρz) the model due to Packwood and Brown1) was used, which is written as.

(1)

An error is thought to exist in the thickness calculation because the backscattering yield near the interface is different when the difference in the atomic numbers is large between the thin-film and the substrate.

Type
Quantitative Biological and Materials Microanalysis by Electrons and X-Rays
Information
Microscopy and Microanalysis , Volume 3 , Issue S2: Proceedings: Microscopy & Microanalysis '97, Microscopy Society of America 55th Annual Meeting, Microbeam Analysis Society 31st Annual Meeting, Histochemical Society 48th Annual Meeting, Cleveland, Ohio, August 10-14, 1997 , August 1997 , pp. 895 - 896
Copyright
Copyright © Microscopy Society of America 1997

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References

Packwood, R. H. and Brown, J. D.X-ray Spectrom. (1981) 10, 138.Google Scholar
Pouchou, J. L. and Pichoir, F.; ICXOM11 ( 1987) p. 249.Google Scholar