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Analysis of superconducting thin films in a modern FIB/SEM dual-beam instrument

Published online by Cambridge University Press:  30 July 2021

Lukas Grünewald ,
Daniel Nerz ,
Marco Langer ,
Sven Meyer ,
Nico Beisig ,
Pablo Cayado ,
Ruslan Popov ,
Jens Hänisch ,
Bernhard Holzapfel  and
Dagmar Gerthsen
Lukas Grünewald
Affiliation:
Karlsruhe Institute of Technology (KIT), Laboratory for Electron Microscopy (LEM), Engesserstraße 7, 76131 Karlsruhe, Germany, United States
Daniel Nerz
Affiliation:
Karlsruhe Institute of Technology (KIT), Laboratory for Electron Microscopy (LEM), Engesserstraße 7, 76131 Karlsruhe, Germany, United States
Marco Langer
Affiliation:
Karlsruhe Institute of Technology (KIT), Institute for Technical Physics (ITEP), Hermann-von-Helmholtz-Platz 1, 76344 Eggenstein-Leopoldshafen, Germany, United States
Sven Meyer
Affiliation:
Karlsruhe Institute of Technology (KIT), Institute for Technical Physics (ITEP), Hermann-von-Helmholtz-Platz 1, 76344 Eggenstein-Leopoldshafen, Germany, United States
Nico Beisig
Affiliation:
Karlsruhe Institute of Technology (KIT), Institute for Technical Physics (ITEP), Hermann-von-Helmholtz-Platz 1, 76344 Eggenstein-Leopoldshafen, Germany, United States
Pablo Cayado
Affiliation:
Karlsruhe Institute of Technology (KIT), Institute for Technical Physics (ITEP), Hermann-von-Helmholtz-Platz 1, 76344 Eggenstein-Leopoldshafen, Germany, United States
Ruslan Popov
Affiliation:
Karlsruhe Institute of Technology (KIT), Institute for Technical Physics (ITEP), Hermann-von-Helmholtz-Platz 1, 76344 Eggenstein-Leopoldshafen, Germany, United States
Jens Hänisch
Affiliation:
Karlsruhe Institute of Technology (KIT), Institute for Technical Physics (ITEP), Hermann-von-Helmholtz-Platz 1, 76344 Eggenstein-Leopoldshafen, Germany, United States
Bernhard Holzapfel
Affiliation:
Karlsruhe Institute of Technology (KIT), Institute for Technical Physics (ITEP), Hermann-von-Helmholtz-Platz 1, 76344 Eggenstein-Leopoldshafen, Germany, United States
Dagmar Gerthsen
Affiliation:
Laboratorium für Elektronenmikroskopie, Karlsruher Institut für Technologie (KIT), Engesserstr. 7, 76131 Karlsruhe, Germany, United States

Abstract

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Type
Advances in Analytical STEM-in-SEM
Information
Microscopy and Microanalysis , Volume 27 , Supplement S1 , August 2021 , pp. 1056 - 1058
Copyright
Copyright © The Author(s), 2021. Published by Cambridge University Press on behalf of the Microscopy Society of America

References

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Grünewald, L., et al. , Supercond. Sci. Technol. 34 (2021) 035005.Google Scholar
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