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Analysis of Contamination in Nanoscaled Film Structures with TEM & XPS

Published online by Cambridge University Press:  31 July 2006

QJ Huang ,
KM Paing  and
CM Lilley
QJ Huang
Affiliation:
University of Illinois at Chicago
KM Paing
Affiliation:
University of Illinois at Chicago
CM Lilley
Affiliation:
University of Illinois at Chicago

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2006 in Chicago, Illinois, USA, July 30 – August 3, 2006

Type
Abstract
Information
Microscopy and Microanalysis , Volume 12 , Issue S02 , August 2006 , pp. 734 - 735
Copyright
© 2006 Microscopy Society of America