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An Analytical Scattering Model for Low Energy Annular Dark Field Transmission Scanning Electron Microscopy

Published online by Cambridge University Press:  23 September 2015

Taylor Woehl ,
Jason Holm  and
Robert Keller
Taylor Woehl
Affiliation:
Material Measurement Lab, NIST, Boulder, CO 80305
Jason Holm
Affiliation:
Material Measurement Lab, NIST, Boulder, CO 80305
Robert Keller
Affiliation:
Material Measurement Lab, NIST, Boulder, CO 80305

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 21 , Supplement S3: Proceedings of Microscopy & Microanalysis 2015 , August 2015 , pp. 1263 - 1264
Copyright
Copyright © Microscopy Society of America 2015 

References

[1] Brodusch, N., Demers, H. & Gauvin, R., Microscopy and Microanalysis 19 (2013) 1688–1697.Google Scholar
[2] Morandi, V. & Merli, P.G., Journal of Applied Physics 101 (2007) 114917.CrossRefGoogle Scholar
[3] Patel, B. & Watanabe, M., Microscopy and Microanalysis 20 (2014) 124–132.Google Scholar
[4] Klein, T., Buhr, E. & Frase, C.G. in: P.W. Hawkes (Ed.) Advances in Imaging and Electron Physics 171 (2012) 297–356.Google Scholar
[5] T. Woehl and J. Holm acknowledge funding from the National Research Council Postdoctoral Research Associateship Program. Contribution of the U.S. Department of Commerce; not subject to copyright in the United States.Google Scholar