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AFM Integrated with SEM/FIB for Complete 3D Metrology Measurements

Published online by Cambridge University Press:  23 September 2015

Aaron Lewis ,
A. Komissar ,
A. Ignatov ,
Oleg Fedoroyov  and
E. Maayan
Aaron Lewis
Affiliation:
The Department of Applied Physics, The Hebrew University of Jerusalem
A. Komissar
Affiliation:
Nanonics Imaging Ltd, 19 Hartum St., BYNET Bldg, Jerusalem, Israel
A. Ignatov
Affiliation:
Nanonics Imaging Ltd, 19 Hartum St., BYNET Bldg, Jerusalem, Israel
Oleg Fedoroyov
Affiliation:
Nanonics Imaging Ltd, 19 Hartum St., BYNET Bldg, Jerusalem, Israel
E. Maayan
Affiliation:
Nanonics Imaging Ltd, 19 Hartum St., BYNET Bldg, Jerusalem, Israel

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 21 , Supplement S3: Proceedings of Microscopy & Microanalysis 2015 , August 2015 , pp. 1433 - 1434
Copyright
Copyright © Microscopy Society of America 2015 

References

(1) Maier, S., Kik, P., Atwater, H. A., Meltzer, S., Harel, E., Koel, B. E. & Requicha, A., g. Local detection of electromagnetic energy transport below the diffraction limit in metal nanoparticle plasmon waveguides. Nature Materials 2003, 2, 229.CrossRefGoogle Scholar
(2) Prikulis, J., Murty, K, Olin, H. & Kall, M., Large area topography analysis and near field Raman spectroscopy using bent fibre probes. Journal of Microscopy 2003, 270, 269–273.CrossRefGoogle Scholar
(3) Raghu, D., Hoffman, J. A., Garnari, B. & Reeves, M. E., Near-field ablation threshold of cellular samples in the mid-infrared wavelength region. Appl Phys Lett 2012, 100, 203703.CrossRefGoogle Scholar
(4) Dekhter, R., Khachatryan, E., Kokotov, Y. & Lewis, A., Investigating material and functional properties of static random access memories using cantilever glass multiple-wire force-sensing thermal probes. Appl Phys Lett 2000, 77, 4425.CrossRefGoogle Scholar
(5) Ren, X., Liu, A., Zou, C., wang, L., Cai, Y., Sun, F., Guo, G. & Guo, G., Interference of surface plasmon polaritons from a "point" source. appl Phys Lett 2011, 98, 201113.CrossRefGoogle Scholar
(6) Lewis, A., Kheifetz, Y., Shambrodt, E., Radko, A., Khatchatryan, E. & Sukenik, C., Fountain pen nanochemistry: atomic force control of chrome etching. Appl Phys Lett 1999, 75, 2689.CrossRefGoogle Scholar
(7) Ternes, M., Lutz, C. P., Hirjibehedin, C. F., Giessibl, F. J. & Heinrich, A. J., The force needed to move an atom on a surface. Science 2008, 319, 1066.CrossRefGoogle ScholarPubMed
(8) Kohlgraf-Owens, D., Sukhov, S. & Dogariu, A., Mapping the Mechanical Action of Light. Phys Review A 2011, 84, 011807.CrossRefGoogle Scholar
(9) Little, A., Hoffman, A. & Haegel, N. M., Optical attenuation coefficient in individual ZnO nanowires. Optics Express 2013, 21, 6321.CrossRefGoogle ScholarPubMed