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AES Investigation of Inhomogenous Metal-Insulator Samples

Published online by Cambridge University Press:  15 November 2005

Gábor Dobos ,
György Vida ,
Zoltán Tóth  and
Katalin Josepovits
Gábor Dobos
Affiliation:
Budapest University of Technology and Economics, Department of Atomic Physics, Surface Physics Laboratory, Budafoki Street 8, Budapest, H-1111, Hungary
György Vida
Affiliation:
General Electric Consumer & Industrial, Váci Street 77, Budapest, H-1340, Hungary
Zoltán Tóth
Affiliation:
General Electric Consumer & Industrial, Váci Street 77, Budapest, H-1340, Hungary
Katalin Josepovits
Affiliation:
Budapest University of Technology and Economics, Department of Atomic Physics, Surface Physics Laboratory, Budafoki Street 8, Budapest, H-1111, Hungary
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Abstract

In this article, the secondary electron-emission properties of both vertically and laterally inhomogeneous samples are discussed. To study the effect of surface coverage, the total electron-emission yield of tungsten and niobium samples was measured as a function of primary electron energy and oxide thickness. A method is suggested to avoid charging difficulties during AES measurements of samples that consist of both metal and various insulator parts.

Keywords

AEScharginginhomogeneityniobiumsecondary electron emissiontungsten
Type
Papers from the European Microbeam Analysis Society Regional Workshop in Bled, Slovenia
Information
Microscopy and Microanalysis , Volume 11 , Issue 6 , December 2005 , pp. 567 - 571
Copyright
© 2005 Microscopy Society of America

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References

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