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Advances in Remote Plasma Cleaning of Electron Microscopes and Charged Beam Instruments

Published online by Cambridge University Press:  09 October 2013

R. Vane
R. Vane*
Affiliation:

Abstract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2013 in Indianapolis, Indiana, USA, August 4 – August 8, 2013.

Type
Abstract
Information
Microscopy and Microanalysis , Volume 19 , Issue S2: Proceedings of Microscopy & Microanalysis 2013 , August 2013 , pp. 1338 - 1339
Copyright
Copyright © Microscopy Society of America 2013