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Advances in High Resolution Helium Ion Microscope (HIM) Imaging

Published online by Cambridge University Press:  26 July 2009

C Sanford ,
J Notte ,
L Scipioni ,
S McVey ,
R Hill ,
S Sijbrandij  and
L Farkas
C Sanford
Affiliation:
Carl Zeiss SMT Inc
J Notte
Affiliation:
Carl Zeiss SMT Inc
L Scipioni
Affiliation:
Carl Zeiss SMT Inc
S McVey
Affiliation:
Carl Zeiss SMT Inc
R Hill
Affiliation:
Carl Zeiss SMT Inc
S Sijbrandij
Affiliation:
Carl Zeiss SMT Inc
L Farkas
Affiliation:
Carl Zeiss SMT Inc

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2009 in Richmond, Virginia, USA, July 26 – July 30, 2009

Type
Abstract
Information
Microscopy and Microanalysis , Volume 15 , Supplement S2 , July 2009 , pp. 654 - 655
Copyright
Copyright © Microscopy Society of America 2009