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Advanced Low Energy Focused Ion Beam Design Based on Immersion Optics

Published online by Cambridge University Press:  07 September 2007

Rauscher M ,
Marianowski K ,
Degel B  and
Plies E
Rauscher M
Affiliation:
University of Tübingen,Germany
Marianowski K
Affiliation:
University of Tübingen,Germany
Degel B
Affiliation:
University of Tübingen,Germany
Plies E
Affiliation:
University of Tübingen,Germany
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Extract

Extended abstract of a paper presented at MC 2007, 33rd DGE Conference in Saarbrücken, Germany, September 2 – September 7, 2007

Type
Research Article
Information
Microscopy and Microanalysis , Volume 13 , Issue S03 , September 2007 , pp. 14 - 15
Copyright
Copyright © Microscopy Society of America 2007

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