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Advanced Hybrid Positioning System of SEM and AFM for 2D Material Surface Metrology

Published online by Cambridge University Press:  09 June 2022

Taeryong Kim ,
Donghwan Kim ,
TaeWan Kim ,
Hyunwoo Kim  and
ChaeHo Shin Open the ORCID record for ChaeHo Shin [Opens in a new window]
Taeryong Kim
Affiliation:
Department of Materials Science & Engineering, Seoul National University, Seoul 08826, South Korea
Donghwan Kim
Affiliation:
Interdisciplinary Materials Measurement Institute, Korea Research Institute of Standards and Science, Daejeon 34113, South Korea
TaeWan Kim
Affiliation:
Department of Electrical Engineering and Smart Grid Research Center, Jeonbuk National University, Jeonju, South Korea
Hyunwoo Kim*
Affiliation:
Laboratory for Advanced Molecular Probing (LAMP), Korea Research Institute of Chemical Technology, Daejeon 34114, South Korea
ChaeHo Shin*
Affiliation:
Interdisciplinary Materials Measurement Institute, Korea Research Institute of Standards and Science, Daejeon 34113, South Korea
*
*Corresponding authors: Hyunwoo Kim, E-mail: [email protected]; ChaeHo Shin, E-mail: [email protected]
*Corresponding authors: Hyunwoo Kim, E-mail: [email protected]; ChaeHo Shin, E-mail: [email protected]
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Abstract

As the measurement scale shrinks, the reliability of nanoscale measurement is even more crucial for a variety of applications, including semiconductor electronics, optical metamaterials, and sensors. Specifically, it is difficult to measure the nanoscale morphology at the exact location though it is required for novel applications based on hybrid nanostructures combined with 2D materials. Here, we introduce an advanced hybrid positioning system to measure the region of interest with enhanced speed and high precision. A 5-axis positioning stage (XYZ, R, gripper) makes it possible to align the sample within a 10-μm field of view (FOV) in both the scanning electron microscope (SEM) and the atomic force microscope (AFM). The reproducibility of the sample position was investigated by comparing marker patterns and denting points between the SEM and AFM, revealing an accuracy of 6.5 ± 2.1 μm for the x-axis and 4.5 ± 1.7 μm for the y-axis after 12 repetitions. By applying a different measurement process according to the characteristics of 2D materials, various information such as height, length, or roughness about MoTe2 rods and MoS2 film was obtained in the same measurement area. As a consequence, overlaid two images can be obtained for detailed information about 2D materials.

Keywords

5-axis positioning systematomic force microscopyMoS2MoTe2overlay imagescanning electron microscopy
Type
Software and Instrumentation
Information
Microscopy and Microanalysis , Volume 28 , Issue 5 , October 2022 , pp. 1604 - 1610
Copyright
Copyright © The Author(s), 2022. Published by Cambridge University Press on behalf of the Microscopy Society of America

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Footnotes

†

These authors contributed equally to this work.

References

Bauerdick, S, Burkhardt, C, Rudorf, R, Barth, W, Bucher, V & Nisch, W (2003). In-situ monitoring of electron beam induced deposition by atomic force microscopy in a scanning electron microscope. Microelectron Eng 67, 963–969.CrossRefGoogle Scholar
Bhimanapati, GR, Lin, Z, Meunier, V, Jung, Y, Cha, J, Das, S, Xiao, D, Son, Y, Strano, MS & Cooper, VR (2015). Recent advances in two-dimensional materials beyond graphene. ACS Nano 9(12), 11509–11539.CrossRefGoogle ScholarPubMed
Chang, K & Chen, W (2011). l-Cysteine-assisted synthesis of layered MoS2/graphene composites with excellent electrochemical performances for lithium ion batteries. ACS Nano 2011(5), 4720–4728.CrossRefGoogle Scholar
Choi, D, Kim, D, Jo, Y, Kim, J, Yoon, E, Lee, H-C & Kim, T (2021). Directly grown Te nanowire electrodes and soft plasma etching for high-performance MoTe2 field-effect transistors. Appl Surf Sci 565, 150521.CrossRefGoogle Scholar
Choi, W, Choudhary, N, Han, GH, Park, J, Akinwande, D & Lee, YH (2017). Recent development of two-dimensional transition metal dichalcogenides and their applications. Mater Today 20(3), 116–130.CrossRefGoogle Scholar
Cun, H, Macha, M, Kim, H, Liu, K, Zhao, Y, Lagrange, T, Kis, A & Radenovic, A (2019). Wafer-scale MOCVD growth of monolayer MoS2 on sapphire and SiO2. Nano Res 12(10), 2646–2652.CrossRefGoogle Scholar
Delvallée, A, Feltin, N, Ducourtieux, S & Trabelsi, M (2013). Comparison of nanoparticle diameter measurements by atomic force microscopy and scanning electron microscopy. In 16th International Congress of Metrology, p. 06007. EDP Sciences.CrossRefGoogle Scholar
Delvallée, A, Feltin, N, Ducourtieux, S, Trabelsi, M & Hochepied, J (2015). Direct comparison of AFM and SEM measurements on the same set of nanoparticles. Meas Sci Technol 26(8), 085601.CrossRefGoogle Scholar
Diaz, HC, Chaghi, R, Ma, Y & Batzill, M (2015). Molecular beam epitaxy of the van der Waals heterostructure MoTe2 on MoS2: Phase, thermal, and chemical stability. 2D Mater 2(4), 044010.CrossRefGoogle Scholar
Doquet, V & Barkia, B (2016). Combined AFM, SEM and crystal plasticity analysis of grain boundary sliding in titanium at room temperature. Mech Mater 103, 18–27.CrossRefGoogle Scholar
Ermakov, A & Garfunkel, E (1994). A novel AFM/STM/SEM system. Rev Sci Instrum 65(9), 2853–2854.CrossRefGoogle Scholar
Fuhs, T, Klausen, LH, Sønderskov, SM, Han, X & Dong, M (2018). Direct measurement of surface charge distribution in phase separating supported lipid bilayers. Nanoscale 10(9), 4538–4544.CrossRefGoogle ScholarPubMed
Golan, Y, Drummond, C, Homyonfer, M, Feldman, Y, Tenne, R & Israelachvili, J (1999). Microtribology and direct force measurement of WS2 nested fullerene-like nanostructures. Adv Mater 11(11), 934–937.3.0.CO;2-L>CrossRefGoogle Scholar
Gsell, S, Schreck, M, Benstetter, G, Lodermeier, E & Stritzker, B (2007). Combined AFM–SEM study of the diamond nucleation layer on Ir (001). Diamond Relat Mater 16(4–7), 665–670.CrossRefGoogle Scholar
Gwaze, P, Annegarn, HJ, Huth, J & Helas, G (2007). Comparison of particle sizes determined with impactor, AFM and SEM. Atmos Res 86(2), 93–104.CrossRefGoogle Scholar
Holz, M, Reuter, C, Reum, A, Ahmad, A, Hofmann, M, Ivanov, T, Mechold, S & Rangelow, IW (2019). Atomic force microscope integrated into a scanning electron microscope for fabrication and metrology at the nanometer scale. In Photomask Technology 2019, p. 111481F. International Society for Optics and Photonics.Google Scholar
Horcas, I, Fernández, R, Gomez-Rodriguez, J, Colchero, J, Gómez-Herrero, J & Baro, A (2007). WSXM: A software for scanning probe microscopy and a tool for nanotechnology. Rev Sci Instrum 78(1), 013705.CrossRefGoogle Scholar
Huo, C, Yan, Z, Song, X & Zeng, H (2015). 2D materials via liquid exfoliation: A review on fabrication and applications. Sci Bull 60(23), 1994–2008.CrossRefGoogle Scholar
Hussain, D, Ahmad, K, Song, J & Xie, H (2016). Advances in the atomic force microscopy for critical dimension metrology. Meas Sci Technol 28(1), 012001.CrossRefGoogle Scholar
Karnik, B, Baumann, M, Masten, S & Davies, S (2006). AFM and SEM characterization of iron oxide coated ceramic membranes. J Mater Sci 41(20), 6861–6870.CrossRefGoogle Scholar
Kim, J-H, Moon, S, Kim, J-W, Lee, D, Park, BC, Kim, D-H, Jeong, Y, Hand, S, Osborne, J & De Wolf, P (2019). Advanced measurement and diagnosis of the effect on the underlayer roughness for industrial standard metrology. Sci Rep 9(1), 1–8.Google ScholarPubMed
Kreith, J, Strunz, T, Fantner, E, Fantner, G & Cordill, M (2017). A versatile atomic force microscope integrated with a scanning electron microscope. Rev Sci Instrum 88(5), 053704.CrossRefGoogle ScholarPubMed
Li, Y, Yang, J, Pan, Z & Tong, W (2020). Nanoscale pore structure and mechanical property analysis of coal: An insight combining AFM and SEM images. Fuel 260, 116352.CrossRefGoogle Scholar
Mak, KF, Lee, C, Hone, J, Shan, J & Heinz, TF (2010). Atomically thin MoS2: A new direct-gap semiconductor. Phys Rev Lett 105(13), 136805.CrossRefGoogle Scholar
Mak, KF & Shan, J (2016). Photonics and optoelectronics of 2D semiconductor transition metaldichalcogenides. Nat Photonics 10, 216–226. doi: 10.1038/nphoton.2015.282.CrossRefGoogle Scholar
Mick, U, Eichhorn, V, Wortmann, T, Diederichs, C & Fatikow, S (2010). Combined nanorobotic AFM/SEM system as novel toolbox for automated hybrid analysis and manipulation of nanoscale objects. In 2010 IEEE International Conference on Robotics and Automation, pp. 4088–4093. IEEE.CrossRefGoogle Scholar
Moon, S, Kim, J-H, Kim, J-H, Kim, YS & Shin, C (2018). A position-controllable external stage for critical dimension measurements via low-noise atomic force microscopy. Ultramicroscopy 194, 48–56.CrossRefGoogle ScholarPubMed
Morant, C, López, MF, Gutiérrez, A & Jiménez, JA (2003). AFM and SEM characterization of non-toxic vanadium-free Ti alloys used as biomaterials. Appl Surf Sci 220(1–4), 79–87.CrossRefGoogle Scholar
Olding, JN, Henning, A, Dong, JT, Zhou, Q, Moody, MJ, Smeets, PJ, Darancet, P, Weiss, EA & Lauhon, LJ (2019). Charge separation in epitaxial SnS/MoS2 vertical heterojunctions grown by low-temperature pulsed MOCVD. ACS Appl Mater Interfaces 11(43), 40543–40550.CrossRefGoogle ScholarPubMed
Orji, NG, Itoh, H, Wang, C, Dixson, RG, Walecki, PS, Schmidt, SW & Irmer, B (2016). Tip characterization method using multi-feature characterizer for CD-AFM. Ultramicroscopy 162, 25–34.CrossRefGoogle ScholarPubMed
Pan, S, Ceballos, F, Bellus, MZ, Zereshki, P & Zhao, H (2016). Ultrafast charge transfer between MoTe2 and MoS2 monolayers. 2D Mater 4(1), 015033.CrossRefGoogle Scholar
Peng, Y, Meng, Z, Zhong, C, Lu, J, Yu, W, Jia, Y & Qian, Y (2001). Hydrothermal synthesis and characterization of single-molecular-layer MoS2 and MoSe2. Chem Lett 30(8), 772–773.CrossRefGoogle Scholar
Poletti, G, Orsini, F, Lenardi, C & Barborini, E (2003). A comparative study between AFM and SEM imaging on human scalp hair. J Microsc 211(3), 249–255.CrossRefGoogle ScholarPubMed
Rangelow, IW, Kaestner, M, Ivanov, T, Ahmad, A, Lenk, S, Lenk, C, Guliyev, E, Reum, A, Hofmann, M & Reuter, C (2018). Atomic force microscope integrated with a scanning electron microscope for correlative nanofabrication and microscopy. J Vac Sci Technol B: Nanotechnol Microelectron: Mater Process Meas Phenom 36(6), 06J102.Google Scholar
Russell, P, Batchelor, D & Thornton, J (2001). SEM and AFM: Complementary techniques for high resolution surface investigations. Veeco Instruments Inc., AN46, Rev A 1, 2004.Google Scholar
Splendiani, A, Sun, L, Zhang, Y, Li, T, Kim, J, Chim, C-Y, Galli, G & Wang, F (2010). Emerging photoluminescence in monolayer MoS2. Nano Lett 10(4), 1271–1275.CrossRefGoogle ScholarPubMed
Tian, F, Qian, X & Villarrubia, JS (2008). Blind estimation of general tip shape in AFM imaging. Ultramicroscopy 109(1), 44–53.CrossRefGoogle ScholarPubMed
Uruma, T, Tsunemitsu, C, Terao, K, Nakazawa, K, Satoh, N, Yamamoto, H & Iwata, F (2019). Development of atomic force microscopy combined with scanning electron microscopy for investigating electronic devices. AIP Adv 9(11), 115011.CrossRefGoogle Scholar
Xie, H, Hussain, D, Yang, F & Sun, L (2015). Atomic force microscope caliper for critical dimension measurements of micro and nanostructures through sidewall scanning. Ultramicroscopy 158, 8–16.CrossRefGoogle ScholarPubMed
Zhao, W, Ghorannevis, Z, Chu, L, Toh, M, Kloc, C, Tan, P-H & Eda, G (2013). Evolution of electronic structure in atomically thin sheets of WS2 and WSe2. ACS Nano 7(1), 791–797.CrossRefGoogle ScholarPubMed
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