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X-ray Analysis of Nano-structures Using the INCAPentaFET-x3 Si(Li) detector

Published online by Cambridge University Press:  05 August 2007

S Burgess ,
J Holland  and
N Rowlands
S Burgess
Affiliation:
Oxford Instruments,UK
J Holland
Affiliation:
Oxford Instruments,UK
N Rowlands
Affiliation:
Oxford Instruments
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Extract

Extended abstract of a paper presented at Microscopy and Microanalysis 2007 in Ft. Lauderdale, Florida, USA, August 5 – August 9, 2007

Type
Research Article
Information
Microscopy and Microanalysis , Volume 13 , Issue S02 , August 2007 , pp. 1438 - 1439
Copyright
© 2007 Microscopy Society of America

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