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Variation of Rutherford Backscattered Ion and Ion-induced Secondary Electron Yield with Atomic Number in the “Orion” Scanning Helium Ion Microscope

Published online by Cambridge University Press:  03 August 2008

BJ Griffin  and
D Joy
BJ Griffin
Affiliation:
The University of Western Australia, Australia
D Joy
Affiliation:
Oak Ridge National Laboratory
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Extract

Extended abstract of a paper presented at Microscopy and Microanalysis 2008 in Albuquerque, New Mexico, USA, August 3 – August 7, 2008

Type
Research Article
Information
Microscopy and Microanalysis , Volume 14 , Supplement S2 , August 2008 , pp. 1190 - 1191
Copyright
© 2008 Microscopy Society of America

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