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Variable-Pressure Soft-Electron Beam Lithography (VP Soft-eBL)

Published online by Cambridge University Press:  05 August 2007

B Myers ,
Z Pan ,
S Donthu  and
V Dravid
B Myers
Affiliation:
Northwestern University
Z Pan
Affiliation:
Northwestern University
S Donthu
Affiliation:
Northwestern University
V Dravid
Affiliation:
Northwestern University
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Extract

Extended abstract of a paper presented at Microscopy and Microanalysis 2007 in Ft. Lauderdale, Florida, USA, August 5 – August 9, 2007

Type
Research Article
Information
Microscopy and Microanalysis , Volume 13 , Issue S02 , August 2007 , pp. 174 - 175
Copyright
© 2007 Microscopy Society of America

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