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Tuning Fifth-Order Aberrations in a Quadrupole-Octupole Corrector

Published online by Cambridge University Press:  30 July 2012

Andrew R. Lupini  and
Stephen J. Pennycook
Andrew R. Lupini*
Affiliation:
Materials Science and Technology Division, Oak Ridge National Laboratory, Oak Ridge, TN 37831, USA
Stephen J. Pennycook
Affiliation:
Materials Science and Technology Division, Oak Ridge National Laboratory, Oak Ridge, TN 37831, USA Department of Physics and Astronomy, Vanderbilt University, Nashville, TN 37235, USA
*
Corresponding author. E-mail: [email protected]; [email protected]
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Abstract

The resolution of conventional electron microscopes is usually limited by spherical aberration. Microscopes equipped with aberration correctors are then primarily limited by higher order, chromatic, and misalignment aberrations. In particular the Nion third-order aberration correctors installed on machines with a low energy spread and possessing sophisticated alignment software were limited by the uncorrected fifth-order aberrations. Here we show how the Nion fifth-order aberration corrector can be used to adjust and reduce some of the fourth- and fifth-order aberrations in a probe-corrected scanning transmission electron microscope.

Keywords

aberrationsspherical aberrationhigher orderSTEM
Type
Special Section: Aberration-Corrected Electron Microscopy
Information
Microscopy and Microanalysis , Volume 18 , Issue 4 , August 2012 , pp. 699 - 704
Copyright
Copyright © Microscopy Society of America 2012

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References

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