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Tomographic Spectral Imaging with a Dual-Beam FIB/SEM: 3D Microanalysis

Published online by Cambridge University Press:  01 August 2004

Paul G. Kotula ,
Michael R. Keenan  and
Joseph R. Michael
Paul G. Kotula
Affiliation:
Sandia National Laboratories, Albuquerque, New Mexico
Michael R. Keenan
Affiliation:
Sandia National Laboratories, Albuquerque, New Mexico
Joseph R. Michael
Affiliation:
Sandia National Laboratories, Albuquerque, New Mexico
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Extract

Extended abstract of a paper presented at Microscopy and Microanalysis 2004 in Savannah, Georgia, USA, August 1–5, 2004.

Type
Research Article
Information
Microscopy and Microanalysis , Volume 10 , Issue S02 , August 2004 , pp. 1132 - 1133
Copyright
© 2004 Microscopy Society of America

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