Hostname: page-component-586b7cd67f-l7hp2 Total loading time: 0 Render date: 2024-11-20T10:26:19.343Z Has data issue: false hasContentIssue false
  • English
  • Français

TEM Investigation of Nitrogen-Doped Amorphous Carbon Coated Field Emitters

Published online by Cambridge University Press:  02 July 2020

A.F. Myers ,
E.B. Steel ,
M. Q. Ding  and
J.J. Cuomo
A.F. Myers
Affiliation:
Materials Science and Engineering Dept., North Carolina State University, Raleigh, NC27695.
E.B. Steel
Affiliation:
Surface and Microanalysis Science Division, Chemical Science and Technology Laboratory, National Institute of Standards and Technology, Gaithersburg, MD20899.
M. Q. Ding
Affiliation:
Materials Science and Engineering Dept., North Carolina State University, Raleigh, NC27695.
J.J. Cuomo
Affiliation:
Materials Science and Engineering Dept., North Carolina State University, Raleigh, NC27695.
Get access

Extract

Amorphous carbon coatings, including highly sp3-bonded amorphous diamond (a-D), also referred to as tetrahedral amorphous carbon (ta-C), and diamond-like carbon (DLC), have recently been explored for field emission applications [1-3]. These coatings can be deposited uniformly at low temperatures, and possess chemical and mechanical properties similar to those of diamond. They also can be doped with nitrogen to form n-type semiconductors [4]. Diamond coatings, on the other hand, are microscopically nonuniform, usually require deposition temperatures greater than 600 °C, and cannot be doped to produce shallow donor levels [2]. Diamond, a-D, and DLC coated emitters all show enhanced electron emission properties [1-3].

The major emphasis of the work presented here is on the parallel electron energy loss spectroscopy (PEELS) characterization of the sp2 and sp3 bonded carbon in the coatings. PEELS spectra and TEM images were recorded with a Philips CM300 FEG TEM, equipped with a Gatan model 666 parallel acquisition EELS spectrometer. The operating voltage was 300 keV.

Type
Recent Developments in Microscopy for Studying Electronic and Magnetic Materials
Information
Microscopy and Microanalysis , Volume 3 , Issue S2: Proceedings: Microscopy & Microanalysis '97, Microscopy Society of America 55th Annual Meeting, Microbeam Analysis Society 31st Annual Meeting, Histochemical Society 48th Annual Meeting, Cleveland, Ohio, August 10-14, 1997 , August 1997 , pp. 489 - 490
Copyright
Copyright © Microscopy Society of America 1997

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1.Chung, F.Y.et al., Appl. Phys. Lett. 68 (1996) 1666.10.1063/1.115899CrossRefGoogle Scholar
2. See Proc. IVMC, in J. Vac. Sci. Technol. B, 11 (1993), 12 (1994), 13 (1995), 14 (1996), 15 (1997).Google Scholar
3.Ding, M.Q.et al., 43rd Amer. Vac. Soc. Natl. Symp. Proc, in J. Vac. Sci. Tech. B (1997).Google Scholar
4.McKenzie, D.R.et al., Diamond Rel. Mater. 3 (1994), 353.10.1016/0925-9635(94)90185-6CrossRefGoogle Scholar
5.Bruley, J.et al., J. Microscopy 180 Pt. 1 (1993) 22.Google Scholar
6.Ding, M.Q.et al., Intl. Conf. Metallurigcal Coatings and Thin Films, April 21-25, 1997, San Diego..Google Scholar
7. The authors gratefully acknowledge beneficial discussions of the PEELS results with Dr.Bruley, J. and Dr.Leapman, R.D.. The use of Dr.Narayan's, J. laser ablation system at NCSU is greatly appreciated.Google Scholar
8. Referral to instrument manufacturers does not indicate endorsement by NIST.Google Scholar