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The Surface Morphology and Characterisation of Electronic Properties of Boron Implanted Microwave Plasma CVD Diamond Films by Atomic Force and Scanning Tunneling Microscopies

Published online by Cambridge University Press:  02 July 2020

A. G. Fitzgerald ,
Y. Fan ,
P. John ,
C. E. Troupe  and
J. I. B. Wilson
A. G. Fitzgerald
Affiliation:
Department of Applied Physics and Electronic & Mechanical Engineering,University of Dundee, Dundee, DD1 4HN, Scotland, UK
Y. Fan
Affiliation:
Department of Applied Physics and Electronic & Mechanical Engineering,University of Dundee, Dundee, DD1 4HN, Scotland, UK
P. John
Affiliation:
Department of Chemistry, Heriot-Watt University, Edinburgh, EH14 4AS, Scotland, UK
C. E. Troupe
Affiliation:
Department of Chemistry, Heriot-Watt University, Edinburgh, EH14 4AS, Scotland, UK
J. I. B. Wilson
Affiliation:
Department of Physics, Heriot-Watt University, Edinburgh, EH14 4AS, Scotland, UK
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Extract

The surface morphology and electronic properties of a low energy boron implanted diamond films with shallow doping, prepared by microwave plasma enhanced chemical vapour deposition (CVD), have been characterised by atomic force microscopy (AFM), scanning tunneling microscopy (STM) and scanning tunneling spectroscopy (STS) techniques.

Both AFM and STM images taken at different locations on the films have exhibited similar morphological features on the (100) crystal surfaces. The crystal surfaces are not atomically flat but are composed of many hillocks as shown in Fig 1(a) to 1(c). The majority of values measured from the peaks of hillocks to the valleys are in the range of 2 to 5 nm, and the diameter of these hillocks is in the range of 50 to 250 nanometers. These crystal surface morphological features are believed to be caused in the high energy boron ion implantation process.

Type
Scanned Probe Microscopy: Much More Than Just Beautiful Images
Information
Microscopy and Microanalysis , Volume 4 , Issue S2: Proceedings: Microscopy & Microanalysis '98, Microscopy Society of America 56th Annual Meeting, Microbeam Analysis Society 32nd Annual Meeting, Atlanta, Georgia July 12-16, 1998 , July 1998 , pp. 332 - 333
Copyright
Copyright © Microscopy Society of America

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References

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