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Surface Microanalysis with Slow Electrons

Published online by Cambridge University Press:  14 July 2006

Ernst G. Bauer
Ernst G. Bauer
Affiliation:
Department of Physics and Astronomy, Arizona State University, Tempe, AZ 85287-1504, USA
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Abstract

Microanalysis on the 10-nm level using imaging, diffraction, and spectroscopy of slow photo-emitted and reflected electrons is discussed. The instrumentation that uses a cathode lens is briefly reviewed, and a number of applications illustrate the power of this microanalysis method.

Keywords

XPEEMXPSXPDLEEMLEED
Type
MODERN DEVELOPMENTS AND APPLICATIONS IN MICROBEAM ANALYSIS
Information
Microscopy and Microanalysis , Volume 12 , Issue 4 , August 2006 , pp. 347 - 351
Copyright
© 2006 Microscopy Society of America

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References

REFERENCES

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