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Space Charge Artifacts in ESEM Images: Shadowing and Contrast Reversal

Published online by Cambridge University Press:  02 July 2020

M. Toth
Affiliation:
Microstructural Analysis Unit, University of Technology, Sydney, Broadway, NSW 2007
M.R. Phillips
Affiliation:
Microstructural Analysis Unit, University of Technology, Sydney, Broadway, NSW 2007
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Extract

The environmental scanning electron microscope (ESEM) employs a series of pressure limiting apertures and a differential pumping system to allow for electron imaging at specimen chamber pressures of up to 50 torr. Images rich in secondary electron (SE) contrast can be obtained using the gaseous secondary electron detector (GSED) or ion current (Iion) signals. The GSED and Iion signals are amplified in a gas cascade. SEs emitted from a sample are accelerated through the gas in the specimen chamber by an electric field, EGSED, produced by a positively biased electrode located in the chamber, above the specimen. The accelerated SEs give rise to a cascade ionization process that can amplify the SE signal by up to three orders of magnitude. Electrons produced in the cascade are rapidly swept to the biased electrode and are efficiently removed from the gas. Positive ions produced in the cascade drift away from the electrode with a velocity that is at least three orders of magnitude lower than that of the electrons.

Type
Working with ESEM and Other Variable Pressure Systems
Copyright
Copyright © Microscopy Society of America

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References

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