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SESAM: Exploring the Frontiers of Electron Microscopy

Published online by Cambridge University Press:  11 October 2006

Christoph T. Koch ,
Wilfried Sigle ,
Rainer Höschen ,
Manfred Rühle ,
Erik Essers ,
Gerd Benner  and
Marko Matijevic
Christoph T. Koch
Affiliation:
Max Planck Institut für Metallforschung, Heisenbergstr. 3, D-70569 Stuttgart, Germany
Wilfried Sigle
Affiliation:
Max Planck Institut für Metallforschung, Heisenbergstr. 3, D-70569 Stuttgart, Germany
Rainer Höschen
Affiliation:
Max Planck Institut für Metallforschung, Heisenbergstr. 3, D-70569 Stuttgart, Germany
Manfred Rühle
Affiliation:
Max Planck Institut für Metallforschung, Heisenbergstr. 3, D-70569 Stuttgart, Germany
Erik Essers
Affiliation:
Carl Zeiss SMT-NTS Division, Carl-Zeiss-Str. 56, 73447 Oberkochen, Germany
Gerd Benner
Affiliation:
Carl Zeiss SMT-NTS Division, Carl-Zeiss-Str. 56, 73447 Oberkochen, Germany
Marko Matijevic
Affiliation:
Carl Zeiss SMT-NTS Division, Carl-Zeiss-Str. 56, 73447 Oberkochen, Germany
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Abstract

We report on the sub-electron-volt-sub-angstrom microscope (SESAM), a high-resolution 200-kV FEG-TEM equipped with a monochromator and an in-column MANDOLINE filter. We report on recent results obtained with this instrument, demonstrating its performance (e.g., 87-meV energy resolution at 10-s exposure time, or a transmissivity of the energy filter of T1 eV = 11,000 nm2). New opportunities to do unique experiments that may advance the frontiers of microscopy in areas such as energy-filtered TEM, spectroscopy, energy-filtered electron diffraction and spectroscopic profiling are also discussed.

Keywords

energy-filtered TEMEELSenergy-filtered electron diffractionenergy filter aberrations
Type
Research Article
Information
Microscopy and Microanalysis , Volume 12 , Issue 6: Special Issue: Frontiers of Electron Microscopy in Materials Science , December 2006 , pp. 506 - 514
Copyright
© 2006 Microscopy Society of America

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References

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