Hostname: page-component-78c5997874-lj6df Total loading time: 0 Render date: 2024-11-09T19:49:54.541Z Has data issue: false hasContentIssue false
  • English
  • Français

Scanning Electron and Ion Microscope-based Size and Shape Metrology at the Nanometer Scale

Published online by Cambridge University Press:  03 August 2008

AE Vladár ,
P Cizmar  and
MT Postek
AE Vladár
Affiliation:
National Institute of Standards and Technology
P Cizmar
Affiliation:
National Institute of Standards and Technology
MT Postek
Affiliation:
National Institute of Standards and Technology
Get access

Extract

Extended abstract of a paper presented at Microscopy and Microanalysis 2008 in Albuquerque, New Mexico, USA, August 3 – August 7, 2008

Type
Research Article
Information
Microscopy and Microanalysis , Volume 14 , Supplement S2 , August 2008 , pp. 118 - 119
Copyright
© 2008 Microscopy Society of America

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)